Article ID Journal Published Year Pages File Type
5358917 Applied Surface Science 2011 4 Pages PDF
Abstract
▶ Ru films were grown on polymorphic TiO2 substrates by ALD. ▶ Anatase TiO2 shows a shorter incubation cycle for Ru ALD. ▶ The difference in the incubation cycle affects the surface morphology of Ru films.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effect of crystalline structure of TiO2 substrates on initial growth of atomic layer deposited Ru thin films
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