Article ID Journal Published Year Pages File Type
5358924 Applied Surface Science 2011 5 Pages PDF
Abstract
▶ ZnO thin films by r.f. sputtering. ▶ Effects of post-annealing on ZnO film quality. ▶ Effects of post-annealing on SAW properties. ▶ Optimal temperature for post-annealing.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering
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