Article ID Journal Published Year Pages File Type
5358927 Applied Surface Science 2011 6 Pages PDF
Abstract
▶ The Si fraction influences various properties of the SiGe films. ▶ The decrease of Si fraction results in an increase of RMS roughness. ▶ The decrease of Si fraction results in an increase of grain size. ▶ The decrease of Si fraction narrows the band gap. ▶ The decreasing Si fraction leads to a dramatic decrease of the resistivity.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
In situ growth of Ge-rich poly-SiGe:H thin films on glass by RF magnetron sputtering for photovoltaic applications
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