| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5359001 | Applied Surface Science | 2014 | 10 Pages |
Abstract
A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100Â nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Markus Kubicek, Gerald Holzlechner, Alexander K. Opitz, Silvia Larisegger, Herbert Hutter, Jürgen Fleig,