Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5359186 | Applied Surface Science | 2014 | 7 Pages |
Abstract
- ZnO films have been grown on (0Â 0Â 0Â 1) sapphire substrates by variable electric field-assisted ALD technique.
- XRD and XPS spectra demonstrate that not only the crystal orientation, but also the oxygen vacancy defect could be modulated by changing the electric field directions of the chamber during precursor pulses.
- The results of HRTEM show the obtained ZnO thin films have a high crystal quality.
- It is supposed that substrate electric polarity would expect to modulate the structures and properties of ZnO films.
Related Topics
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Authors
Weier Lu, Yabin Dong, Chaobo Li, Yang Xia, Bangwu Liu, Jing Xie, Nan Li, Yanqing Zhang,