Article ID Journal Published Year Pages File Type
5359264 Applied Surface Science 2011 8 Pages PDF
Abstract
▶ The effects of deposition parameters on the properties of ZnO films deposited on glass substrates are revealed in this paper. ▶ The granular structures of the ZnO films are enhanced with the increasing film thickness, deposition pressure and substrate temperature. ▶ Thinner film, higher deposition pressure and higher substrate temperature enhance the optical transmittance of the ZnO.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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