Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5359266 | Applied Surface Science | 2011 | 6 Pages |
Abstract
â¶ Nanocrystalline SnOx thin films were deposited by pulsed laser ablation at 470Â K. â¶ Almost stoichiometric films were grown in the presence of 13.3Â Pa of oxygen. â¶ Increasing the deposition oxygen pressure up to 66.7Â Pa a worsening of the structural properties was observed. â¶ SAED analysis shows that the unit cell shrinks along the principal crystallographic axes due to oxygen vacancies, according to the stoichimetric parameter values.
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Authors
E. Fazio, F. Neri, R. Ruggeri, G. Sabatino, S. Trusso, G. Mannino,