| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5359292 | Applied Surface Science | 2011 | 6 Pages |
Abstract
ⶠTi/TiN multilayer films were successfully deposited by pulse biased arc ion plating. ⶠThe highest hardness value reached 43 GPa for the modulation period of 54 nm. ⶠA good adhesion of the deposited films is achieved with a maximum adhesion of 83 N. ⶠSuch superhard multilayer films would be favorable for application in the future.
Related Topics
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Physical and Theoretical Chemistry
Authors
Yanhui Zhao, Guoqiang Lin, Jinquan Xiao, Hao Du, Chuang Dong, Lijun Gao,