| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5359296 | Applied Surface Science | 2011 | 5 Pages |
Abstract
ⶠDiffusion in multilayers can be monitored in situ by measuring the period over time. ⶠInterface growth in Mo/Si multilayers obeys parabolic growth law after 10-50 h. ⶠThe diffusion coefficients in the diffusion controlled regime obey Arrhenius law.
Related Topics
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Physical and Theoretical Chemistry
Authors
S. Bruijn, R.W.E. van de Kruijs, A.E. Yakshin, F. Bijkerk,