Article ID Journal Published Year Pages File Type
5359309 Applied Surface Science 2011 5 Pages PDF
Abstract
▶ The substrate position angle influences the ion flux in CVAD. ▶ The ion flux obviously influences the adhesion of ZnO films on polyimide substrates. ▶ The substrate position angle influences the microstructure of ZnO films deposited by CVAD.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Influence of the substrate position angle on the adhesion of ZnO thin films deposited on polyimide foil substrates
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