Article ID Journal Published Year Pages File Type
5359341 Applied Surface Science 2011 5 Pages PDF
Abstract
▶ High-quality epitaxial TiCxOy films are successfully grown on MgO (0 0 1) substrates. ▶ The stoichiometry of TiCxOy is about x ∼ 0.47 and y ∼ 0.69. ▶ The TiCxOy film is electrically conducting with resistivity of 137 μ Ω cm.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Epitaxial growth of titanium oxycarbide on MgO (0 0 1) substrates by pulsed laser deposition
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