Article ID Journal Published Year Pages File Type
5359345 Applied Surface Science 2011 6 Pages PDF
Abstract
▶ Pre-hydrogen glow discharge decreases amorphous incubation volume. ▶ Pre-hydrogen glow discharge increases the nuclei density. ▶ Substrate surface morphology affects the formation of crystalline.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology
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