Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5359731 | Applied Surface Science | 2013 | 7 Pages |
Abstract
NiTi thin films were deposited by DC magnetron sputtering from an equiatomic NiTi alloy target onto Si(1Â 0Â 0) substrates without intentional heating of the substrate. These films have been characterized for their structure, micro-structure, composition and surface characteristics by various analytical techniques.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
S.K. Sharma, S. Mohan,