Article ID Journal Published Year Pages File Type
5359731 Applied Surface Science 2013 7 Pages PDF
Abstract
NiTi thin films were deposited by DC magnetron sputtering from an equiatomic NiTi alloy target onto Si(1 0 0) substrates without intentional heating of the substrate. These films have been characterized for their structure, micro-structure, composition and surface characteristics by various analytical techniques.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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