Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5359855 | Applied Surface Science | 2010 | 4 Pages |
Abstract
ZnO thin films were prepared by pulsed laser deposition at room temperature on glass substrates with oxygen pressures of 10-30 Pa. The structural, electrical, and optical properties of ZnO films were studied in detail. ZnO films had an acceptable crystal quality with high c-axis orientation and smooth surface. The resistivity was in the 102 Ω cm order for ZnO films, with the electron concentration of 1016-1017 cmâ3. All the films showed a high visible transmittance â¼90% and a high UV absorption about 90-100%. The UV emission â¼390 nm was observed in the photoluminescence spectra. The oxygen pressures in the 10-30 Pa range were suitable for room temperature growth of high-quality ZnO films.
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Authors
Xiangli Ma, Jun Zhang, Jianguo Lu, Zhizhen Ye,