| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5359903 | Applied Surface Science | 2014 | 5 Pages |
Abstract
18O-enriched SiO2 thin film with the 16O:18O ratio of around 1:1 has been analyzed by laser-assisted atom probe tomography (LA-APT) using 343Â nm-wavelength ultraviolet laser or 532Â nm-wavelength green laser in order to investigate the quantitativeness of the oxygen concentration determined by LA-APT. No clear evidence for detecting 16O18O++ signals was found in mass spectra, implying that the peaks at mass/charge of 16 and 18 are dominated by O+, not by O2++. The calculated elemental composition indicated significant loss of oxygen in LA-APT analysis of SiO2.
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Authors
T. Kinno, M. Tomita, T. Ohkubo, S. Takeno, K. Hono,