Article ID Journal Published Year Pages File Type
5360045 Applied Surface Science 2013 6 Pages PDF
Abstract
► High C ionization was realized by replacing the pure graphite target to the stably HPPMS discharged Cr target in reactive C2H2 gas. ► Less than 2% Cr atoms were doped in the prepared Cr-DLC films by controlling the poisoning of the target surface induced by reactive gas. ► A smooth surface and a dense structure with high sp3 bond content were obtained due to the intense ion bombardment induced by the highly ionized C flux. ► Compared to the substrate, the Cr-DLC films displayed low friction coefficient and excellent corrosion resistance
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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