Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5360045 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠High C ionization was realized by replacing the pure graphite target to the stably HPPMS discharged Cr target in reactive C2H2 gas. ⺠Less than 2% Cr atoms were doped in the prepared Cr-DLC films by controlling the poisoning of the target surface induced by reactive gas. ⺠A smooth surface and a dense structure with high sp3 bond content were obtained due to the intense ion bombardment induced by the highly ionized C flux. ⺠Compared to the substrate, the Cr-DLC films displayed low friction coefficient and excellent corrosion resistance
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zhongzhen Wu, Xiubo Tian, Gang Gui, Chunzhi Gong, Shiqin Yang, Paul K. Chu,