| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5360065 | Applied Surface Science | 2013 | 8 Pages |
Abstract
- An innovative study on the wet etching on Indium Antimony was performed in two different aqueous solutions.
- The morphology and the chemistry of the formed oxide are controlled.
- The importance of a correct fit of XPS spectra in 3d regions is highlighted.
- We show that different oxide can be obtained for identical etching rates depending on the chemistry of the aqueous solution.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
D. Aureau, R. Chaghi, I. Gerard, H. Sik, J. Fleury, A. Etcheberry,