| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5360104 | Applied Surface Science | 2013 | 7 Pages |
Abstract
- The MRI model is extended for the non-Gaussian roughness distribution.
- The deviations between the simulated sputter depth profiles with Gaussian and non-Gaussian roughness distributions are evaluated quantitatively.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Y. Liu, W. Jian, J.Y. Wang, S. Hofmann, J. Kovac,