Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5360150 | Applied Surface Science | 2009 | 5 Pages |
Abstract
A novel approach is presented for nanohole 3D-size tailoring. The process starts with a monolayer of polystyrene (PS) beads spun coat on silicon wafer as a template. The holes can be directly prepared through combustion of PS beads by oxygen plasma during metal or oxide thin film deposition. The incoming particles are prevented from adhering on PS beads by H2O and CO2 generated from the combustion of the PS beads. The hole depth generally depends on the film thickness. The hole diameter can be tailored by the PS bead size, film deposition rate, and also the combustion speed of the PS beads. In this work, a series of holes with depth of 4-24Â nm and diameter of 10-36Â nm has been successfully prepared. The hole wall materials can be selected from metals such as Au or Pt and oxides such as SiO2 or Al2O3. These templates could be suitable for the preparation and characterization of novel nanodevices based on single quantum dots or single molecules, and could be extended to the studies of a wide range of coating materials and substrates with controlled hole depth and diameters.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Xiaofeng Peng, Itaru Kamiya,