Article ID Journal Published Year Pages File Type
5360250 Applied Surface Science 2013 5 Pages PDF
Abstract
► Comparison of methods: Impulse Plasma Deposition and Pulsed Magnetron Sputtering. ► Study of differences in phase composition of Fe-Cu layers produced by IPD and PMS. ► The layers deposited by IPD was characterized by non-equilibrium phase composition. ► The synthesis by PMS leads to obtain the polycrystalline two-phase composition.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Dependence of the specific features of two PAPVD methods: Impulse Plasma Deposition (IPD) and Pulsed Magnetron Sputtering (PMS) on the structure of Fe-Cu alloy layers
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