Article ID Journal Published Year Pages File Type
5360264 Applied Surface Science 2013 8 Pages PDF
Abstract
► Surface plasmon resonance is used to estimate filling defects in nano-imprint lithography. ► A novel mold structure is designed and fabricated for estimating filling defects. ► Both simulation and experiment demonstrate the feasibility of the proposed method.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Surface plasmon resonance as an innovative method for filling defects monitoring in nanoimprint lithography
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