| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5360267 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠A comparative study of TiN deposition by the usual reactive route vs. the more direct non-reactive route has been performed. ⺠Films prepared by the non-reactive route showed improved mechanical and tribological performance, due to lower presence of contaminations. ⺠The application of biasing in case of a non-reactive route leads to outstanding hardness enhancement (up to 45 GPa). ⺠Extended XRD analysis allows discriminating the origin of peaks displacements.
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Authors
D. MartÃnez-MartÃnez, C. López-Cartes, A. Fernández, J.C. Sánchez-López,