| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5360384 | Applied Surface Science | 2013 | 9 Pages |
Abstract
⺠Greater concentrations of oxides observed in InP/InGaAs/InGaAsP QW microstructures irradiated in air than in those irradiated in DI water ⺠Rapid thermal annealing decomposes surface oxides and induces oxygen atoms diffusion toward the active region of the QW microstructures ⺠Excessive amount of oxygen in the laser irradiated and RTA samples is consistent with the enhanced intermixing and bandgap blue shifting ⺠Following the RTA step, the chemical composition of the excimer laser irradiated InP cap becomes indistinguishable from that of as-grown InP.
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Authors
Neng Liu, Jan J. Dubowski,