Article ID Journal Published Year Pages File Type
5360413 Applied Surface Science 2013 6 Pages PDF
Abstract
► Deposition of SiC film from polycarbosilane precursor by modified CVD method. ► Polymer to ceramics conversion at moderate temperature of 800, 900 and 1000 °C. ► Formation of β-SiC and α-SiC films on silicon (1 1 1) wafer at moderate temperatures. ► Enhanced hardness(18 GPa), toughness of coated samples than that of uncoated sample. ► Promising material for MEMS application.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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Liquid polycarbosilane derived SiC coating on silicon (1 1 1) wafer for enhanced mechanical properties
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