Article ID Journal Published Year Pages File Type
5360423 Applied Surface Science 2013 5 Pages PDF
Abstract
► a-SiC:H films were prepared by layer-by-layer hydrogen plasma annealing technique. ► The electrical and optical properties of prepared films were studied. ► Photo-conductivity was improved after hydrogen plasma annealing. ► High photo-sensitivity (∼106) was achieved for 10 s layer-by-layer annealed film.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Hydrogenated amorphous silicon-carbide thin films with high photo-sensitivity prepared by layer-by-layer hydrogen annealing technique
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