Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5360438 | Applied Surface Science | 2013 | 21 Pages |
Abstract
⺠Lead-free piezoelectric BCZT thin films were grown on Si by magnetron sputtering. ⺠The conduction mechanisms and local electromechanical properties were investigated. ⺠A considerably high effective piezoelectric coefficient of 94 ± 4 pm/V was observed.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
B.C. Luo, D.Y. Wang, M.M. Duan, S. Li,