| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5360455 | Applied Surface Science | 2013 | 6 Pages |
Abstract
⺠Zinc oxide (ZnO) thin films were doped with chromium (Cr) through reactive dual sputtering for gas sensing applications. ⺠The Cr concentrations were in the range of 1-4 at%, and were changed by controlling the sputtering power. ⺠The 1 at% Cr doped ZnO showed the highest response at operating temperature of 300 °C. ⺠The sensor shows repeatability and a linear response with the acetone concentrations at the range from 15 to 1000 ppm.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
N.H. Al-Hardan, M.J. Abdullah, A. Abdul Aziz,