Article ID Journal Published Year Pages File Type
5360645 Applied Surface Science 2013 9 Pages PDF
Abstract
► TiN/TiCN multilayer films were conducted by plasma nitriding treatment. ► After plasma nitriding treatment, the film structure was changed significantly. ► The variation of the structure leaded to improve the film properties. ► The internal stresses and the hardness showed a declining trend slightly. ► The tribological behaviors of the films were improved by plasma-nitriding.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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