Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5360657 | Applied Surface Science | 2013 | 4 Pages |
Abstract
⺠Glancing angle deposition (GLAD) was studied using three dimensional molecular dynamics simulations. ⺠The film structure and surface roughness were investigated for both static and rotational GLAD. ⺠The surface roughness was shown to be identical for both cases.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Matilda Backholm, Morten Foss, Kai Nordlund,