Article ID Journal Published Year Pages File Type
5360657 Applied Surface Science 2013 4 Pages PDF
Abstract
► Glancing angle deposition (GLAD) was studied using three dimensional molecular dynamics simulations. ► The film structure and surface roughness were investigated for both static and rotational GLAD. ► The surface roughness was shown to be identical for both cases.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition
Authors
, , ,