| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5360675 | Applied Surface Science | 2013 | 4 Pages |
Abstract
⺠The metastable copper nitride films were studied by femtosecond laser pulses irradiation. ⺠The femtosecond laser process generates the metal precipitation of Cu in the copper nitride matrix at the nanometer scale. ⺠The microstructure, morphology and electrical resistance of Cu3N films present regular changes with the decrease of laser power density. ⺠A delicate balance of ablated and decomposed contributions to determine the optimal decomposed rate of Cu3N films induced by femtosecond laser. ⺠The resistance value of some samples is low enough to serve as a conductive layer for microelectronic application after irradiation.
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Authors
S.Y. Wang, J.H. Qiu, X.Q. Wang, N.Y. Yuan, J.N. Ding, W.H. Huang,