Highly controllable and reproducible ZnO nanowire arrays growth with focused ion beam and low-temperature hydrothermal method

- High-quality ZnO nanowire arrays with controllable degrees over size, orientation, uniformity and periodicity were fabricated on GaN substrate with focused ion beam etching and low-temperature hydrothermal method.
- The influence of patterned growth holes (shape, depth, size and period) on the final morphology of ZnO nanowire arrays was carefully investigated and discussed.
- Possible mechanism was proposed to interpret the growth process in and out of the pattern holes.