Article ID Journal Published Year Pages File Type
5361178 Applied Surface Science 2009 5 Pages PDF
Abstract
The experimental measurements were performed at the MT-LAB, IRST (Istituto per la Ricerca Scientifica e Tecnologica) of Bruno Kessler Foundation for Research in Trento.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Influence of interfaces density and thermal processes on mechanical stress of PECVD silicon nitride
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