Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361185 | Applied Surface Science | 2009 | 5 Pages |
Abstract
Ga-doped ZnO (ZnO:Ga) transparent conductive films were deposited on glass substrates by DC reactive magnetron sputtering. The structural, electrical, and optical properties of ZnO:Ga films were investigated in a wide temperature range from room temperature up to 400 °C. The crystallinity and surface morphology of the films are strongly dependent on the growth temperatures, which in turn exert an influence on the electrical and optical properties of the ZnO:Ga films. The film deposited at 350 °C exhibited the relatively well crystallinity and the lowest resistivity of 3.4 Ã 10â4 Ω cm. More importantly, the low-resistance and high-transmittance ZnO:Ga films were also obtained at a low temperature of 150 °C by changing the sputtering powers, having acceptable properties for application as transparent conductive electrodes in LCDs and solar cells.
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Authors
X. Bie, J.G. Lu, L. Gong, L. Lin, B.H. Zhao, Z.Z. Ye,