| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361217 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠A high power pulsed magnetron sputtering was explored in depositing TiC:H thin film on a stainless steel 304. ⺠The sputtering processed TiC:H thin film/stainless steel 304 system exhibits minimal residual stress. ⺠The TiC:H thin film adheres firmly to the substrate showing the effectiveness of this process.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Jyh Gwo, Chun-Lin Chu, Ming-Jui Tsai, Shyong Lee,