Article ID Journal Published Year Pages File Type
5361220 Applied Surface Science 2012 5 Pages PDF
Abstract
► We deposited AlN coating using RF magnetron sputtering. ► Al interlayer was deposited to improve film bonding to substrate. ► The deposition conditions were optimized in order to achieve the smooth coating. ► Electrical properties depend on interlayer.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Structural and electrical properties of AlN films deposited using reactive RF magnetron sputtering for solar concentrator application
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