Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361241 | Applied Surface Science | 2012 | 9 Pages |
Abstract
⺠Multipulse processing of Si by fs UV laser and evolution of surface structures. ⺠Multiscale structures range from nm to hundreds of micrometers. ⺠Generation of “carpet-like” pattern of spikes in the center of the spot. ⺠Evolution of a liquid foam layer on the silicon surface. ⺠Generation of surface tension waves at the peripheral region of the spot.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
S. Lugomer, A. MaksimoviÄ, B. Farkas, Z. Geretovszky, T. Szörényi, A.L. Tóth, Z. Zolnai, I. Bársony,