Article ID Journal Published Year Pages File Type
5361247 Applied Surface Science 2012 8 Pages PDF
Abstract
► We prepared Cr-Al-N films at various deposition parameters by multi-arc ion plating. ► We examined the phase structures of Cr-Al-N films by XRD and XPS. ► We systematically evaluated macroparticles, hardness and adhesion strength of Cr-Al-N films.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Influence of deposition parameters on hard Cr-Al-N coatings deposited by multi-arc ion plating
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