Article ID Journal Published Year Pages File Type
5361284 Applied Surface Science 2012 7 Pages PDF
Abstract
► The relationship between structure and properties of CrAlN film is investigated. ► The microstructure of the CrAlN is analyzed in detail as a function of the bias voltage. ► The mechanism of the evolution of the mechanical properties is expounded. ► The CrAlN film shows excellent wear resistance and low friction coefficient at −100 V. ► The corrosion resistance is influenced by Al content and structure of the film.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering
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