| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361290 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠GZO films were deposited by electron beam assisted RF magnetron sputtering. ⺠The effect of electron irradiation on the properties of GZO films was investigated. ⺠The work-function is increased with electron irradiation energy.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Y.S. Kim, S.B. Heo, H.M. Lee, Y.J. Lee, I.S. Kim, M.S. Kang, D.H. Choi, B.H. Lee, M.G. Kim, Daeil Kim,