Article ID Journal Published Year Pages File Type
5361315 Applied Surface Science 2014 32 Pages PDF
Abstract
The tests proved the values of selected mechanical properties (hardness ca. 10.5 GPa, Young modulus ca. 95 GPa) and adhesion (delamination force ca. 11.5 mN) to be higher in the case of SiCN:H anti-wear coating (deposited in SiH4:CH4:N2 = 1:1:2 gas mixture) than the values of the respective parameters obtained in the remaining modifications. Further, carbon doped coatings (SiCN:H) exhibited significantly improved hardness (by about 50 to 70%) and nearly threefold increase in delamination force in comparison with SiCN:H coatings.
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Chemical composition and selected mechanical properties of Al-Zn alloy modified in plasma conditions by RF CVD
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