Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

Article ID	Journal	Published Year	Pages	File Type
5361431	Applied Surface Science	2012	5 Pages	PDF

Abstract

âº We designed and fabricated an improved sensing window based on the ICP method. âº The sensitivity of the sensor was enhanced by a factor of 2.8 in theory. âº The etching rate of P(MMA-GMA) was twice as fast as that of SU-8 2005. âº The parameters were optimized to minimize the surface roughness in the etched area. âº The sensor presented a higher sensitivity than the conventional waveguide sensor.

Keywords

Inductively coupled plasma etching Polymer

Related Topics

Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

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Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

Authors

Xibin Wang, Jie Meng, Xiaoqiang Sun, Tianfu Yang, Jian Sun, Changming Chen, Chuantao Zheng, Daming Zhang,