Article ID Journal Published Year Pages File Type
5361484 Applied Surface Science 2012 6 Pages PDF
Abstract
► Effects of Vb on as-deposited, annealed and heated AlxOy films are studied. ► The crystallization intensity of heated films gets weaker with increasing Vb. ► Grain refinement for as-deposited films and crack surface for annealed are found. ► Films after annealing exhibit higher transmittance but lower microhardness.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effects of negative substrate bias voltage on the structure and properties of aluminum oxide films prepared by DC reactive magnetron sputtering
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