Article ID Journal Published Year Pages File Type
5361505 Applied Surface Science 2012 4 Pages PDF
Abstract
► Surface-textured AZO films were achieved by combining PDMS method with wet etching. ► The AZO film deposited at 230 °C by PDMS exhibited the best performance. ► It is due to the higher plasma density supplied from PDMS system. ► Wet etching of the films produces a crater-like rough surface morphology.
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Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells
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