| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361608 | Applied Surface Science | 2009 | 4 Pages |
Abstract
Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Keiji Hayashi, Daisuke Tanaka, Harumi Araki, Tomoki Maruyama, Daisuke Matsumura, Kazuho Toyoda, Noriyuki Tsuji,