Article ID Journal Published Year Pages File Type
5361635 Applied Surface Science 2009 4 Pages PDF
Abstract
This study investigated the optical and electrical properties of Nb-doped TiO2 thin films prepared by pulsed laser deposition (PLD). The PLD conditions were optimized to fabricate Nb-doped TiO2 thin films with an improved electrical conductivity and crystalline structure. XRD analyses revealed that the deposition at room temperature in 0.92 Pa O2 was suitable to produce anatase-type TiO2. A Nb-doped TiO2 thin film attained a resistivity as low as 6.7 × 10−4 Ω cm after annealing at 350 °C in vacuum (<10−5 Pa), thereby maintaining the transmittance as high as 60% in the UV-vis region.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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