Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361635 | Applied Surface Science | 2009 | 4 Pages |
Abstract
This study investigated the optical and electrical properties of Nb-doped TiO2 thin films prepared by pulsed laser deposition (PLD). The PLD conditions were optimized to fabricate Nb-doped TiO2 thin films with an improved electrical conductivity and crystalline structure. XRD analyses revealed that the deposition at room temperature in 0.92 Pa O2 was suitable to produce anatase-type TiO2. A Nb-doped TiO2 thin film attained a resistivity as low as 6.7 Ã 10â4 Ω cm after annealing at 350 °C in vacuum (<10â5 Pa), thereby maintaining the transmittance as high as 60% in the UV-vis region.
Related Topics
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Authors
K. Tonooka, Te-Wei Chiu, N. Kikuchi,