Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361723 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠The low frequency ns laser is used to structure a large area silicon surface efficiently. ⺠The three types of structures are found in the structured surface. ⺠The dependence of optical and electronic properties on scanning speed and laser pulse energy are shown. ⺠The structured surface is crystalline and the sulfur element is found in the shallow surface up to about one micrometer in depth.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Xiaohong Li, Liyang Chang, Rong Qiu, Cai Wen, Zhihui Li, Sifu Hu,