| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361750 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Ge epi-ready wafers from two different vendors studied using X-ray spectroscopy. ⺠Oxide layer on all the Ge wafer surfaces formed by GeO and GeO2; layer thickness depending on wafer vendor. ⺠Probable presence of chlorine at the wafer surfaces. ⺠Wafer surfaces from one of the vendors contaminated by carbonates.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
M. Gabás, S. Palanco, S. Bijani, E. Barrigón, C. Algora, I. Rey-Stolle, I. GarcÃa, J.R. Ramos-Barrado,