Article ID Journal Published Year Pages File Type
5361760 Applied Surface Science 2012 7 Pages PDF
Abstract
► The minimum resistivity of films on drum was 2.7 × 10−3 Ω cm. ► The resistivity of post- annealed films was 5.1 × 10−4 Ω cm. ► The oxygen negative ions dominated films properties at erosion area. ► The active oxygen dominated films properties at non-erosion area.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
The influences of high energetic oxygen negative ions and active oxygen on the microstructure and electrical properties of ZnO:Al films by MF magnetron sputtering
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