Article ID Journal Published Year Pages File Type
5361783 Applied Surface Science 2011 6 Pages PDF
Abstract
► Interactions between tri-methylaluminum molecules on OH-terminated Si (0 0 1) surface. ► High energy barriers due to interaction between the two molecules. ► Mixed surface chemistry at an intermediate surface temperature.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Interactions between tri-methylaluminum molecules and their effect on the reaction of tri-methylaluminum with an OH-terminated Si (0 0 1) surface
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