| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361794 | Applied Surface Science | 2011 | 6 Pages |
Abstract
⺠We evaluated the pretreatment procedure of Ni nanoparticles (NPs) on the growth of multiwalled carbon nanotube (MWCNT) bundles by means of microwave plasma chemical vapor deposition (MPCVD). ⺠The diameter and shape of the Ni NPs were the dominant factors affecting the size and density of the MWCNT bundles. ⺠We obtained MWCNTs that fully filled the via effectively; they might serve as potential interconnects in future nanodevices.
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Physical and Theoretical Chemistry
Authors
Derming Lian, Chien-Huang Tsai,